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    PRODUCT
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    UV-LED Light source for Mask alinger

    ① Exposure size: 4’’ 6’’ 8’’

    ② Wavelength: 365nm, 385nm, 395nm, 405nm

    Single wavelength and Multi-wavelengths

    ③  Effective working area:
    4'': 110*110mm
    6'': 160*160mm
    8'': 200*200mm

    ④  Uniformity: ≤4%  (max-min)/ (max+min) *100%

    ⑤ Intensity:
    4'': >100mw@365nm  25A
    6'': > 50mw@365nm   25A

    8'': 25-50mw@365nm 25A

    ⑥ Collimate angle:

    4'': ≤1.8°

    6'': ≤1.3°

    8'': ≤1.2°-2°

    ⑦ Working distance: 100-350nm
    ⑧ Cooling method:Liquid cooling

                                     

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